| 摘要 |
PROBLEM TO BE SOLVED: To easily optimize impedance in testing, with a tester, output signals of a semiconductor device which output high-frequency signals. SOLUTION: In a high-frequency signal output testing method for testing, with the tester 30, a semiconductor device 10 which outputs high-frequency signals from an output terminal, an impedance matching circuit 40 having a plurality of impedance adjusting units 44 for providing different amounts of impedance adjustment and selection circuits 41-43 for selecting any impedance adjusting unit according to a selection signal is connected to the output terminal. High-frequency signals output by the impedance matching circuit are measured with the tester as changing the selection of the impedance adjusting units to select an optimal impedance adjusting unit on the basis of results of the measurements. With this state maintained, high-frequency signals are tested with the tester. COPYRIGHT: (C)2011,JPO&INPIT
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