| 摘要 |
PROBLEM TO BE SOLVED: To self-diagnose whether degradation requiring heating cleaning occurs in a moisture sensitive element using a moisture sensitive element, a temperature sensitive element, and a heating means that are originally included in a humidity sensor. SOLUTION: A humidity measuring device includes the humidity sensor having a humidity element and temperature element for measuring relative humidity and temperature and a heater for performing heating cleaning of the humidity element. A first dew-point calculation unit 21 of the humidity measuring device determines a first dew-point temperature based on the relative humidity and temperature in a measurement environmental atmosphere before heater heating. A second dew-point calculation unit 22 determines a second dew-point temperature based on the relative humidity and temperature during the heater heating. When a difference occurs between the dew-point temperature before the heater heating and that during the heater heating, the humidity element is already degraded by the measurement environmental atmosphere. A degradation decision unit 23 determines whether the degradation requiring the cleaning occurs in the moisture sensitive element based on the difference betwen the first dew-point temperature and second dew-point temperature. COPYRIGHT: (C)2011,JPO&INPIT
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