| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing industrially simply and inexpensively a titanium oxide-based transparent conductive substrate exhibiting superb conductivity and transparency, in a simple coating method without applying calcination before annealing treatment. SOLUTION: Precursor solution containing (A) a reaction product obtained by making a titanium compound react with hydrogen peroxide and (B) a reaction product obtained by making a niobium compound or a tantalum compound react with hydrogen peroxide is prepared, is coated on a transparent substrate, and is then put under aging treatment in which it is left as it is for a given period at room temperature, and then, is put under annealing treatment of heating under reduction atmosphere, without going through calcination, to have a transparent conductive film made of titanium oxide with niobium or tantalum doped formed on a transparent substrate. COPYRIGHT: (C)2011,JPO&INPIT
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