发明名称 WORKMANSHIP PREDICTION APPARATUS, WORKMANSHIP PREDICTION METHOD, WORKMANSHIP PREDICTION PROGRAM, AND PROGRAM RECORDING MEDIUM
摘要 <p>A workmanship prediction apparatus ensures stable update of regression coefficient even if there is collinearity between explanatory variables and can improve the accuracy of prediction of workmanship. A prediction module (17) obtains a workmanship calculation value (20) on the basis of process data (15) collected by a process data collection unit (16). A correction module (18) multiplies the workmanship calculation value (20) by a correction factor (24) to calculate a corrected workmanship calculation value (25) and adds a difference value (21)between devices thereto to obtain a workmanship prediction value (23). Thereafter, a correction factor correction unit (22) calculates the correction factor (24) from a workmanship actual measurement value (19) and the workmanship prediction value (23) and corrects the correction factor (24). Thus, correction of a prediction expression used by the correction module (18) is performed by correcting only the correction factor (24). Therefore, update of the regression coefficient becomes stable even if there is collinearity between explanatory variables, and destabilization of the regression coefficient which is caused by the collinearity between explanatory variables and deterioration of the prediction accuracy can be prevented, whereby the prediction accuracy can be improved.</p>
申请公布号 WO2010119894(A1) 申请公布日期 2010.10.21
申请号 WO2010JP56680 申请日期 2010.04.14
申请人 SHARP KABUSHIKI KAISHA;CHIBA, SHUICHIRO;YAMANAKA, HIDEKAZU 发明人 CHIBA, SHUICHIRO;YAMANAKA, HIDEKAZU
分类号 H01L21/02;G05B19/418;G06Q50/00;G06Q50/04 主分类号 H01L21/02
代理机构 代理人
主权项
地址