LASER BEAM DRILLING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a laser beam drilling method capable of machining a hole of high quality without degrading the machining speed.

SOLUTION: In the laser beam drilling method, the optical axis of laser beam 9 output from a laser beam oscillator 8 is deflected by oscillating a flat mirror 1 fixed to a shaft end of an oscillating shaft 2j to position the laser beam 9 at the desired position. The deformation of the flatness of the mirror 1 when the mirror 1 is oscillated is obtained matching the lapse of time with the time T0 at which the mirror 1 enters the predetermined permissible positioning range being the starting point, and the time t after the mirror 1 enters the predetermined permissible positioning range and before the laser beam 9 is applied to a part to be machined is determined in advance as the machining condition based on the obtained result.

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