| 摘要 |
PROBLEM TO BE SOLVED: To provide a variable wavelength filter with superior optical characteristics without incurring the increase in a driving voltage. SOLUTION: A second substrate 3 has two faces which have different positions in thickness direction on a movable part 21 side, one of the two faces has a driving electrode 33, the other face has a detection electrode 40, electrostatic chucking force is generated between the driving electrode 33 and a movable part 21 by generating a potential difference between them on the basis of a capacitance between the detection electrode 40 and the movable part 21, thus the movable part 21 is varied, light reflections are repeated between a fixed reflection film 35 and a movable reflection film 25, an interference is produced, and light having a wavelength corresponding to the distance between the fixed reflection film 35 and the movable reflection film 25 is emitted to outside. COPYRIGHT: (C)2011,JPO&INPIT
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