| 摘要 |
PROBLEM TO BE SOLVED: To reduce the bolt diameter of a fastening portion by receiving inertial torque developed due to the self-weight of a power supply by disturbance, by a torque reaction structure. SOLUTION: This turbomolecular pump device 10 includes: a pump body 11; the power supply 14 driving and controlling the pump body 11; and a cooling device 13 interposed between the pump body 11 and the power supply 14 and cooling the power supply 14. The torque reaction structure receiving torque reaction applied by the disturbance is provided in the fastening portion between the cooling device 13 and the power supply 14. COPYRIGHT: (C)2011,JPO&INPIT |
