摘要 |
PROBLEM TO BE SOLVED: To provide a mass spectrometer with MCPs (micro channel plates) easy to replace and capable of securing the orthogonality of their incidence planes to ion trajectories with high accuracy. SOLUTION: In a vacuum container consisting of a vacuum flange 6 and a body 1, a flight tube 2 is arranged in which ions fly. A MCP group 4 is mounted at the terminal end via a MCP-IN electrode 3. The vacuum flange 6 is detachably mounted on the body 1, and the MCP group 4 is biased toward the end of the flight tube 2 by a spring 710 which is provided on a circuit board 7 for detection, mounted on the vacuum flange 6, to secure the orthogonality to ion flight trajectories. COPYRIGHT: (C)2011,JPO&INPIT
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