发明名称 PROCESS TO REMOVE METAL CONTAMINATION ON TCO
摘要 The present disclosure relates to methods and related cleaning solutions (116) for cleaning a glass substrate (10, 112), such as for removing metal ion contaminates from a glass substrate (10, 112) having a transparent conductive oxide layer (12). One method includes: providing a glass substrate (10, 112) having a transparent conductive oxide (TCO) layer (12); and exposing the glass substrate (10, 112) to a cleaning solution (116) that includes 0.5% to 5% organic acid, wherein the organic acid used includes citric acid, acetic acid, or oxalic acid.
申请公布号 WO2010120902(A2) 申请公布日期 2010.10.21
申请号 WO2010US31060 申请日期 2010.04.14
申请人 APPLIED MATERIALS, INC.;MEI, FANG;TANNER, DAVID 发明人 MEI, FANG;TANNER, DAVID
分类号 H01L31/042;H01L31/18 主分类号 H01L31/042
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