| 摘要 |
PROBLEM TO BE SOLVED: To provide a tilt stage which attains size reduction by reducing the thickness of a stacked portion of a base and the stage in the stacking direction. SOLUTION: The tilt stage includes: a first plate; first, second and third support units provided on the first plate; and a second plate tiltably supported by the support units. The three support units are arranged around a virtual point on the first plate. The respective support units are arranged radially to a normal line of the first plate passing through the virtual point. Each of the support units includes: a first guide means having a guide path along a direction inclined to the normal line at a predetermined angle; a second guide means which is guided to the first guide means and has a guide path in a direction orthogonal to a guide direction of the first guide means, and a spherical bearing which is guided to the second guide means and tiltably connects the second plate to the second guide means. COPYRIGHT: (C)2011,JPO&INPIT |
