| 摘要 |
PROBLEM TO BE SOLVED: To solve the problems wherein, in a conventional vibration type infrared sensor, a change of a resonance frequency or a Q-value is not necessarily large because vibration displaced vertically to the longitudinal direction of a beam is utilized, and heightening of sensitivity of the sensor is difficult. SOLUTION: In this infrared sensor, torsional vibration is newly introduced into the infrared sensor, and torsional vibration is utilized in deformation of a vibrator generated by a temperature rise caused by infrared absorption, by utilizing a dynamic system for changing the resonance frequency or the like. COPYRIGHT: (C)2011,JPO&INPIT
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