Piezoelectric/electrostrictive structure and method for manufacturing the same

摘要

A piezoelectric/electrostrictive structure includes a plurality of stacked sheet-shaped piezoelectric/electrostrictive bodies and at least one sheet of a thin film. The interfaces between the piezoelectric/electrostrictive bodies are exposed at side faces of the piezoelectric/electrostrictive structure, the side faces have notches, and at least one sheet of a thin film is placed on the notched portions of side faces. A method for manufacturing a piezoelectric/electrostrictive structure comprises stacking a plurality of ceramic green sheets made of a piezoelectric/electrostrictive material and firing the stacked ceramic green sheets to prepare fired piezoelectric/electrostrictive bodies and a step of forming at least one sheet of a thin film on side faces of the fired piezoelectric/electrostrictive bodies by a chemical vapor deposition process, the interfaces between the sheets are exposed at the side faces.