VACUUM PROCESSING APPARATUS, VACUUM PROCESSING METHOD AND STORAGE MEDIUM,申请号KR20080061848-传众专利搜索

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发明名称	VACUUM PROCESSING APPARATUS, VACUUM PROCESSING METHOD AND STORAGE MEDIUM
摘要
申请公布号	KR100989220(B1)	申请公布日期	2010.10.20
申请号	KR20080061848	申请日期	2008.06.27
申请人		发明人
分类号	G02F1/13;C23C16/00;H01L21/02	主分类号	G02F1/13
代理机构		代理人
主权项
地址

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