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摘要
申请公布号
JP4565244(B2)
申请公布日期
2010.10.20
申请号
JP20080208924
申请日期
2008.08.14
申请人
发明人
分类号
C23C14/24;B32B3/10;B32B15/08;H01L21/285
主分类号
C23C14/24
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