| 摘要 |
<p>Sample holder (8) and ion-beam processing system are offered which permit a good sample (7) adapted for observation (such as TEM (transmission electron microscopy) observation). The sample holder has a sample placement portion (9) having a sample stuck surface (10). The holder further includes a shielding material guide portion (12) placed over the sample placement portion. The guide portion is fixedly mounted to the sample placement portion and has a shielding material guide surface (13). The sample stuck surface is in a position rearward to the position of the shielding material guide surface by a given amount of 40 µm. Therefore, when the sample having a thickness of 100 µm is attached to the sample stuck surface, the sample protrudes 60 µm ahead of the shielding material guide surface. The shielding material (16) having a thickness of about 20 µm is then placed in position over the shielding material guide surface.
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