ALUMINUM NITRIDE POWDER, MANUFACTURING METHOD THEREOF, ALUMINUM NITRIDE SINTERED BODY USING THE POWDER, AND MANUFACTURING METHOD OF THE ALUMINUM NITRIDE SINTERED BODY

摘要

PURPOSE: An aluminum nitride powder, a manufacturing method thereof, an aluminum nitride sintered body using the powder, and a manufacturing method of the aluminum nitride sintered body are provided to reduce the amount of residual oxygen by fixing or trapping impurity oxygen. CONSTITUTION: A method for manufacturing aluminum nitride powders comprises the steps of: vaporizing the chloroaluminum stored at an aluminum source storage unit by heating a heating unit; increasing the temperature of a reaction chamber to the temperature which is lower than the nitride thermal treatment temperature by inputting the ammonia gas to 5~100ml flow rate and the nitrogen gas of 50~400ml flow rate into the reaction chamber; increasing the temperature of the reaction chamber to the nitrogen thermal treatment temperature by inputting the ammonia gas to 100~600ml flow rate and the nitrogen gas of 400~800ml flow rate into the reaction chamber; supplying the vaporized chloroaluminum gas into the reaction chamber by supplying nitrogen gas to the aluminum source storage unit; and forming the aluminum nitride powers by chemically reacting the chloroaluminum gas with the ammonia gas.