| 发明名称 |
METHOD FOR PRODUCING POROUS MICROSTRUCTURES, POROUS MICROSTRUCTURES PRODUCED BY THIS METHOD AND USE THEREOF |
| 摘要 |
<p>A method for manufacturing porous microstructures in a silicon semiconductor substrate, porous microstructures manufactured according to this method, and the use thereof.</p> |
| 申请公布号 |
EP2240402(A2) |
申请公布日期 |
2010.10.20 |
| 申请号 |
EP20080869947 |
申请日期 |
2008.11.19 |
| 申请人 |
ROBERT BOSCH GMBH |
发明人 |
SCHOLTEN, DICK;PIRK, TJALF;STUMBER, MICHAEL;LAERMER, FRANZ;REICHENBACH, RALF;FEYH, ANDO |
| 分类号 |
A61K9/00;A61M31/00;A61M37/00 |
主分类号 |
A61K9/00 |
| 代理机构 |
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