| 摘要 |
FIELD: machine building. ^ SUBSTANCE: unit of cathode of magnetron diffuser consists of cathode-target (1), of central magnet (2), of system of peripheral magnets (3), of cooling system (4), of foundation out of magnet material (5) and of metal screen (6) installed below surface of cathode-target. Cathode target (1), foundation out of magnetic material (5) and ring (7) with sealing elements (8) are interconnected with upper (9) and lower (10) flanges made in form of a screw-clamp. A non-magnetic insertion is installed between system of cooling (4) and foundation out of magnet material (5). ^ EFFECT: invention prevents section of cathode-target coating and increases quality of sputtering. ^ 1 dwg |
