POSITIONING SYSTEM FOR A MICROSTAGE,申请号EP20080801117-传众专利搜索

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发明名称	POSITIONING SYSTEM FOR A MICROSTAGE
摘要
申请公布号	EP2130237(B1)	申请公布日期	2010.10.20
申请号	EP20080801117	申请日期	2008.07.28
申请人	FEINMESS DRESDEN GMBH	发明人	BROMME, ALEXANDER
分类号	H01L41/09	主分类号	H01L41/09
代理机构		代理人
主权项
地址

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