SUBSTRATE TREATMENT APPARATUS,申请号KR20080018770-传众专利搜索

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发明名称	SUBSTRATE TREATMENT APPARATUS
摘要
申请公布号	KR100989279(B1)	申请公布日期	2010.10.20
申请号	KR20080018770	申请日期	2008.02.29
申请人		发明人
分类号	H01L21/677;H01L21/67;H01L21/687	主分类号	H01L21/677
代理机构		代理人
主权项
地址

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