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发明名称
METHOD FOR MANUFACTURING SIMOX WAFER AND SIMOX WAFER MANUFACTURED BY SUCH METHOD
摘要
申请公布号
EP1909309(A4)
申请公布日期
2010.10.20
申请号
EP20050762078
申请日期
2005.07.22
申请人
SUMCO CORPORATION
发明人
TAKAHASHI, ISAO;NAKAI, TETSUYA
分类号
H01L21/02;H01L27/12
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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