| 摘要 |
Integrated circuits (1) on a wafer comprise a wafer substrate (2) and a plurality of integrated circuits (1a, 1b, 1c) formed on the wafer substrate (2). Each integrated circuit (1a, 1b, 1c) comprises an electric circuit (24) and some of the integrated circuits (1b, 1c) comprise, in addition to their electric circuits (24), process control modules (3) as integral parts. The process control modules (3) are employed during dicing and pick-and-place to align the dicing/pick-and-place devices. |
