发明名称 |
HIGH RATE DEPOSITION FOR THE FORMATION OF HIGH QUALITY OPTICAL COATINGS |
摘要 |
<p>High rate deposition methods comprise depositing a powder coating from a product flow. The product flow results from a chemical reaction within the flow. Some of the powder coatings consolidate under appropriate conditions into an optical coating. The substrate can have a first optical coating onto which the powder coating is placed. The resulting optical coating following consolidation can have a large index-of-refraction difference with the underlying first optical coating, high thickness and index-of-refraction uniformity across the substrate and high thickness and index-of-refraction uniformity between coatings formed on different substrates under equivalent conditions. In some embodiments, the deposition can result in a powder coating of at least about 100 nm in no more than about 30 minutes with a substrate having a surface area of at least about 25 square centimeters.</p> |
申请公布号 |
EP1644553(A4) |
申请公布日期 |
2010.10.20 |
申请号 |
EP20040753377 |
申请日期 |
2004.05.27 |
申请人 |
NEOPHOTONICS CORPORATION |
发明人 |
BI, XIANGXIN;LOPEZ, HERMAN, A.;NARASIMHA, PRASAD;EUVRARD, ERIC;MOSSO, RONALD, J. |
分类号 |
C23C16/40;B05D3/02;B05D7/00;B32B;C03B37/018;C23C16/44;C23C16/452;C23C16/453;C23C16/48;C23C16/56;C23C24/00;C23C24/04;G02B6/10;G02B6/132 |
主分类号 |
C23C16/40 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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