| 摘要 |
[Object] In a diaphragm-type piezoelectric pump using a bimorph piezoelectric element, a factor that hinders the displacement of the piezoelectric element is removed so as to provide an efficient piezoelectric pump. [Solving Means] A piezoelectric pump includes a diaphragm 21 that forms a pump chamber 12 between the diaphragm and a pump body 10, and a piezoelectric element 22 bonded face-to-face to a surface of the diaphragm. The piezoelectric element 22 is a bimorph piezoelectric element in which a plurality of piezoelectric layers are stacked, including a neutral layer 22b that does not spontaneously become displaced in the middle of the piezoelectric element in the thickness direction. The piezoelectric element 22 can efficiently become displaced, because a neutral plane Fd of the entire diaphragm combined with the piezoelectric element is positioned in the neutral layer 22b. |
