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发明名称
Toroidal low-field reactive gas source
摘要
申请公布号
EP1313131(B1)
申请公布日期
2010.10.20
申请号
EP20030002616
申请日期
1998.06.23
申请人
MKS INSTRUMENTS, INC.
发明人
SMITH, DONALD, K.;CHEN, XING;HOLBER, WILLIAM;GEORGELIS, ERIC
分类号
H01L21/205;H01J37/32;H05H1/46;H01J27/16;H01L21/302;H01L21/3065
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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