发明名称 |
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME |
摘要 |
PURPOSE: A semiconductor device and a method of manufacturing the same are provided to prevent a process fail due to the misalignment of a conductive pattern and a connection member by forming an opening which is self-aligned along the center of the connection member. CONSTITUTION: A substrate(100) comprises at least one lower conduction pattern. A first interlayer insulating film(200) having a first opening(205) exposes the conductive pattern. A connection member(210) fills the first opening to be connected to the lower conduction pattern. A second interlayer insulating layer(500) includes a second opening having the same central shaft as the connection member. An upper conductive pattern(510) files the second opening to be connected to the connection member.
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申请公布号 |
KR20100112669(A) |
申请公布日期 |
2010.10.20 |
申请号 |
KR20090031065 |
申请日期 |
2009.04.10 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
NA, JONG JIN |
分类号 |
H01L21/3205;H01L21/28;H01L21/768 |
主分类号 |
H01L21/3205 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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