发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 PURPOSE: A semiconductor device and a method of manufacturing the same are provided to prevent a process fail due to the misalignment of a conductive pattern and a connection member by forming an opening which is self-aligned along the center of the connection member. CONSTITUTION: A substrate(100) comprises at least one lower conduction pattern. A first interlayer insulating film(200) having a first opening(205) exposes the conductive pattern. A connection member(210) fills the first opening to be connected to the lower conduction pattern. A second interlayer insulating layer(500) includes a second opening having the same central shaft as the connection member. An upper conductive pattern(510) files the second opening to be connected to the connection member.
申请公布号 KR20100112669(A) 申请公布日期 2010.10.20
申请号 KR20090031065 申请日期 2009.04.10
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 NA, JONG JIN
分类号 H01L21/3205;H01L21/28;H01L21/768 主分类号 H01L21/3205
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