发明名称 |
Industrial microdeposition system including masking to reduce the impact of droplet alignment and droplet volume tolerances and errors |
摘要 |
A microdeposition system microdeposits droplets of fluid material to define a feature pattern on a substrate. The feature pattern for the substrate is defined. A mask is created for the feature pattern that reduces a density of defects that occur due to a malfunctioning nozzle of the microdeposition head. The droplets of fluid material are microdeposited onto the substrate based on the mask to define sub-features of the feature pattern. One of the nozzles of the microdeposition head is assigned to each of the sub-features in the feature pattern. The nozzles may be assigned randomly or using other functions. The assigned nozzles in the mask are assigned to one of a plurality of passes of the microdeposition head.
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申请公布号 |
US7815965(B2) |
申请公布日期 |
2010.10.19 |
申请号 |
US20090562494 |
申请日期 |
2009.09.18 |
申请人 |
ULVAC, INC. |
发明人 |
EDWARDS CHARLES O.;ALBERTALLI DAVID |
分类号 |
B05D1/32;B05D5/12;B41J2/21;H01L51/00;H01L51/40;H01L51/56;H05K3/12 |
主分类号 |
B05D1/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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