发明名称 Supporting apparatus, exposure apparatus, and device manufacturing method
摘要 A supporting apparatus supports a movable element by a bearing. The apparatus has a moment reducing unit that exerts a force on a portion of the movable element, which is different from a portion supported by the bearing. The moment reducing unit reduces a moment that acts on the movable element when the portion of the movable element, which is supported by the bearing, changes as the movable element moves. This stabilizes the attitude of the movable element.
申请公布号 US7817251(B2) 申请公布日期 2010.10.19
申请号 US20070853506 申请日期 2007.09.11
申请人 CANON KABUSHIKI KAISHA 发明人 KIMURA ATSUSHI
分类号 G03B27/58;G03B27/42;G03B27/62;H02K41/02 主分类号 G03B27/58
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