FILM FORMING APPARATUS, FILM FORMING METHOD, AND STORAGE MEDIUM

摘要

PURPOSE: A film forming apparatus, a film forming method, and a storage medium are provided to form a thin film by sequentially supplying two kinds of reaction gases to the surface of a substrate. CONSTITUTION: A turn table(2) has a rotation shaft in a vacuum container(1). The vacuum container comprises a body(12) of a cup type and a ceiling panel(11) of a disc shape. The turn table is fixed to a core unit of a cylindrical shape. The core unit is fixed to the upper part of a rotation shaft. The rotation shaft and a driving unit are received into a cylindrical case.