发明名称 Device and method for hermetically sealing a cavity in an electronic component
摘要 To hermetically seal a cavity in a microelectronic component, a cap located in a sealing device is positioned above the orifice opening into the cavity. The cap plastically deforms to seal the cavity. The sealing device includes a cavity permitting the cavity of the microelectronic component to be filled. The sealing device slides along the component so as to be positioned opposite either the filling cavity, or the cap.
申请公布号 US7816770(B2) 申请公布日期 2010.10.19
申请号 US20050721128 申请日期 2005.12.13
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE;CENTRE NATIONAL D'ETUDES SPATIALES 发明人 LAI AYMERIC
分类号 H01L23/48 主分类号 H01L23/48
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