发明名称 Method for manufacturing thin film transistor
摘要 Disclosed is a method for manufacturing a thin film transistor having high resolution and high pattern accuracy with high production efficiency. Particularly disclosed is a method for manufacturing a thin film transistor wherein there is prevented deterioration of semiconductor properties in a plating step for electrode formation. This method is characterized in that a source electrode or a drain electrode is formed by such a process wherein a protective film is formed on an organic semiconductor layer, then a plating catalyst pattern is formed thereon by supplying a liquid containing a plating catalyst, and then a plating agent is brought into contact with the pattern.
申请公布号 US7816263(B2) 申请公布日期 2010.10.19
申请号 US20060989912 申请日期 2006.07.18
申请人 KONICA MINOLTA HOLDINGS, INC. 发明人 HIRAI KATSURA
分类号 H01L21/44;H01L51/40 主分类号 H01L21/44
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