| 摘要 |
A substrate for inspecting a thickness of contacts at least includes a dielectric layer, a first metal layer, and a second metal layer. The first metal layer which includes a circuit region and a testing region is formed on an upper surface of the dielectric layer, and the circuit region has a plurality of contacts. The second metal layer which has a hollowed region is formed on a lower surface of the dielectric layer, and the hollowed region is aligned with the testing region of the first metal layer to avoid the interference when the testing region is inspected.
|
