| 摘要 |
<p>PURPOSE: A light irradiation apparatus with an air cleaning device is provided to prevent the contamination of an optical component such as a lens and a mirror by purifying the air in a light irradiation apparatus. CONSTITUTION: A light source(1) includes an ultraviolet ray radiated from a lamp(1a). The light collected from a condensing lens is projected on an integrator lens through a shutter. A reflector(2) has a wavelength selection filter between the integrator lens and the reflector. The light from the integrator lens is projected on a collimator lens(6) through a second reflector(5). The light from the collimator lens is projected on a target face.</p> |
