SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD,申请号KR20080012330-传众专利搜索

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发明名称	SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
摘要
申请公布号	KR100988390(B1)	申请公布日期	2010.10.18
申请号	KR20080012330	申请日期	2008.02.11
申请人		发明人
分类号	C23C16/455;C23C16/00	主分类号	C23C16/455
代理机构		代理人
主权项
地址

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