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经营范围
发明名称
Plasma Treatment Apparatus
摘要
申请公布号
KR100988169(B1)
申请公布日期
2010.10.18
申请号
KR20060030540
申请日期
2006.04.04
申请人
发明人
分类号
H01L21/02;H01L21/265;H01L21/3065
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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