PURPOSE: In order to be over the time cross section, it diminishes to the end part which is close a pair of protrusions with substrate the substrate support device forms. CONSTITUTION: A pair of clamp(120, 130) is combined in the frame(110). The substrate(170) is allowed in between a pair of clamps. A pair of protrusions(140, 150) is formed in order to each other face in one end of a pair of clamps. A pair of protrusions supports substrate. In one end part among a pair of protrusions, the groove(142) is formed in order to be corresponded to the location of the end part of the other one.
