发明名称 LIQUID JET HEAD, LIQUID JET DEVICE, AND ACTUATOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a liquid jet head which restrains a piezoelectric element from getting damaged by restraining stress concentration, and to provide a liquid jet device and an actuator device. SOLUTION: The liquid jet head includes: a piezoelectric element 300 comprising a first electrode 60, a piezoelectric material layer 70, and a second electrode 80, which are provided on one side of a channel forming substrate 10 provided with a pressure generation chamber 12 communicating with a nozzle opening 21 for jetting a liquid; and a protective film 100 made of an inorganic insulating material for covering the piezoelectric element and provided with an opening 101 to expose the top face of the second electrode. The piezoelectric element deforms to project toward the pressure generation chamber side when it is driven, and the end E1 of the opening of the protective film in the longitudinal direction of the pressure generation chamber is located nearer to the center than an area S1 where the center of curvature of the bend of the piezoelectric element near the peripheral wall of the pressure generation chamber is located on the pressure generation chamber side. The liquid jet device has the liquid jet head. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2010228269(A) 申请公布日期 2010.10.14
申请号 JP20090077844 申请日期 2009.03.26
申请人 SEIKO EPSON CORP 发明人 YAZAKI SHIRO;HIRAI EIKI
分类号 B41J2/045;B41J2/055 主分类号 B41J2/045
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