| 摘要 |
PROBLEM TO BE SOLVED: To provide a processing liquid feeder and a method for feeding a processing liquid for correcting a component concentration of a processing liquid without considerably damaging productivity. SOLUTION: Component liquids (first chemical, second chemical and pure water) from component liquid feeding pipes 31, 32, 33 are fed into a mixing part 26 interposed in a processing liquid charging pipe 25. These component liquids are mixed by the mixing part 26 and fed into a processing liquid tub 10 thereafter. A component concentration of a processing liquid 14 in the processing liquid tub 10 is measured by a component concentration measuring instrument 20. If it is detected that any component concentration is lacked, the total quantity (total supplementary quantity) of processing liquids to be supplemented in order to raise a liquid level in the processing liquid tub 10 to a supplement suspension liquid level height is calculated. On the basis of the total supplementary quantity, individual quantities of component liquids to be supplemented are calculated to correct the lacked component concentration. A plurality of component liquids are mixed by the mixing part 26 at a flow rate equal to a ratio of the individual supplementary quantities, and fed from the processing liquid charging pipe 25 into the processing liquid tub 10. COPYRIGHT: (C)2011,JPO&INPIT
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