| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce the size of an angular velocity sensor capable of detecting an angular velocity about a plurality of detection axes. <P>SOLUTION: A detection element 11 includes a base part 12, driving arms 14A, 14B including a driving electrode 13 to which a driving signal is input and connected to the base part 12, and first and second detection arms 15A, 15B connected to the base part 12 and outputting a detection signal. The first and second detection arms 15A, 15B are formed so as to be extended parallel to each other. First and second detection electrodes 17A, 17B are formed on the first detection arm 15A, and third and fourth detection electrodes 17C, 17D are formed on the second detection arm 15B. The first detection electrode 17A is formed at a side opposite the second detection arm 15B, and the second detection electrode 17B is formed at the side of the second detection arm 15B in the first detection arm 15A. The third detection electrode 17C is formed at the side of the first detection arm 15A, and the fourth detection electrode 17D is formed at a side opposite the first detection arm 15A in the second detection arm 15B. <P>COPYRIGHT: (C)2011,JPO&INPIT |
