METHOD FOR MANUFACTURING MICROFINE RESIN STRUCTURE, MICROFINE RESIN STRUCTURE MANUFACTURED BY THE SAME, OPTICAL WAVEGUIDE, MICROLENS, MICROLENS ARRAY, AND MICROFLUID DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a microfine resin structure, obtaining the microfine resin structure formed in an accurate position, and also to provide highly precise and various kinds of microdevices obtained by such a manufacturing method.

SOLUTION: The method for manufacturing the microfine resin structure includes steps of: (a) aligning a mold so as to position above the target position of a substrate in such a state that a resin layer on the substrate is melted and softened; (b) forming a primary molded body by releasing a mold after an aligned mold is pressed and contacted with a melted and softened resin and cooled down to the temperature at which a resin layer is solidified; and (c) measuring shift amount based on the shift amount in an x direction, a y direction, and a θ direction from the target position on the substrate in the primary molded body, and (d) when the shift amount exceeds the predetermined value, it is corrected and adjusted, and further steps (a)-(d) are repeated, and when the shift amount is within the range of the predetermined value, the molding steps are finished.

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