| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a substrate holding jig and method, simply and absolutely holding a substrate regardless of its thinness. <P>SOLUTION: A substrate holding jig is equipped with: a carrier 2 for supporting a substrate 10; and a presser plate 3 for fixing the substrate 10 to a carrier 2 and composed of a magnetic substance. A recessed part 2a to which the substrate 10 is mounted is formed on the upper surface 2A of the carrier 2 and a first magnet 22 hitting, and contacting the presser plate 3 is buried in an outer circumference part 21 forming an outline of the concave part 2a. A second magnet 23 is buried in the bottom surface 2B of the concave part 2a. The presser plate 3 has: a frame-shaped base 31 formed along the outer circumference part 21 and absorbed by the first magnet 22; and an elastic deformation part 32 extended from the base 31 to the inside of the frame shape and absorbed by the second magnet 23. The elastic deformation part 32 provides: the substrate holding jig 1 composed so as to bend with a base end in the extended direction as fulcrum; and the substrate holding method using the substrate holding jig 1. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
