| 摘要 |
PROBLEM TO BE SOLVED: To provide the method of transferring a substrate which can control the deviation of the substrate on a tray. SOLUTION: A tray 51 positioned on a first place is supported by a hand. The tray 51 is sandwiched between first chucks 61a and 61b away from each other in one direction. The tray 51 is moved to a second place by moving the hand and the first chucks 61a and 61b. After the tray 51 is moved to the second place, the tray 51 and a substrate 52 are sandwiched between second chucks 62a and 62b positioned between the first chucks 61a and 61b in one direction and away from each other in one direction. After the tray 51 is moved to the second place, the first chucks 61a and 61b are opened. After the tray 51 and the substrate 52 are sandwiched and the first chucks 61a and 61b are opened, the tray 51 is moved to a third place by moving the hand and the second chucks 62a and 62b. COPYRIGHT: (C)2011,JPO&INPIT
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