| 摘要 |
PROBLEM TO BE SOLVED: To provide a displacement detecting device for detecting a relative displacement between two substrates without using a magnetic shield, a filtering operation and the like, under such the condition that it is affected by a noise magnetic field. SOLUTION: The displacement detecting device 10 includes a signal processing circuit 40 for detecting the relative displacement between the substrates 20, 30. The substrate 20 includes: a magnet 22 for generating a first magnetic field; and a detection circuit 21 for detecting a second magnetic field as a first magnetic signal from the external environment. The second substrate 30 includes a detection circuit 31 for detecting a composite signal of the second magnetic field and an AC component of the first magnetic field representing the relative displacement between the substrates 20, 30, as a second magnetic signal. The signal processing circuit 40 extracts the AC component of the first magnetic field by executing a differential operation between the first magnetic signal and the second magnetic signal. The AC component of the first magnetic field is a magnetic signal representing the relative displacement between the substrates 20, 30. COPYRIGHT: (C)2011,JPO&INPIT
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