| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical displacement meter which has a simple apparatus structure, can be manufactured at low cost, and can measure the displacement of an object under measurement with high precision. SOLUTION: A concave mirror is placed so that its center O' may be positioned on a reflection optical path from a measurement point A on a surface under measurement and the distance AO' may become its radius of curvature. A half mirror is placed so that its center O may be positioned on the reflection optical path between the measurement point A and the concave mirror. A light receiving element for receiving the reflected light by the half mirror is provided. An optical system is thus constructed. COPYRIGHT: (C)2011,JPO&INPIT
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