| 摘要 |
PROBLEM TO BE SOLVED: To provide a detergent for resists having excellent defoaming properties and wettability. SOLUTION: The detergent for resists comprises (A) a compound expressed by formula (1) (R<SP>1</SP>and R<SP>2</SP>represent each an alkyl group), a compound expressed by formula (2) (m and n represent each a positive number of 0.5-25; m+n is 1-40), and (B) a polyoxy(ethylene-propylene) block polymer expressed by formula (3) HO(C<SB>2</SB>H<SB>4</SB>O)<SB>w</SB>(C<SB>3</SB>H<SB>6</SB>O)<SB>x</SB>(C<SB>2</SB>H<SB>4</SB>O)<SB>y</SB>H (w, x, y are each a positive number) and having 1,000-7,000 weight average molecular weight, 10-55 wt.% content of ethylene oxide and 45-90 wt.% content propylene oxide. COPYRIGHT: (C)2011,JPO&INPIT
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