发明名称 BUMPED, SELF-ISOLATED GaN TRANSISTOR CHIP WITH ELECTRICALLY ISOLATED BACK SURFACE
摘要 A semiconductor device comprising a silicon substrate, a compound semiconductor material, an insulating material between the silicon substrate and the compound semiconductor material, and a top surface comprising means of electrical connection, and passivation material, where the passivation material is silicon nitride, silicon dioxide, or a combination of both. The present invention eliminates the need for a thick electrical insulator between a heat sink and the back surface of a surface mounted device by the inclusion of an AlN seed layer to electrically isolate the silicon substrate of the device. The sidewalls of the device are also electrically isolated from the active area of the device.
申请公布号 US2010258844(A1) 申请公布日期 2010.10.14
申请号 US20100756975 申请日期 2010.04.08
申请人 LIDOW ALEXANDER;BEACH ROBERT;NAKATA ALANA;CAO JIANJUN 发明人 LIDOW ALEXANDER;BEACH ROBERT;NAKATA ALANA;CAO JIANJUN
分类号 H01L29/772;H01L23/367;H01L23/488 主分类号 H01L29/772
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