发明名称 SOLUTION-PROCESSED HIGH MOBILITY INORGANIC THIN-FILM TRANSISTORS
摘要 This invention provides various semiconductor and dielectric components and/or transistor devices. More specifically, this invention discloses solution-phase method of preparing a thin film transistor device, said method providing a first fluid medium containing an inorganic semiconductor component selected from Group 12-Group 15 metals; contacting said first fluid medium with a substrate component, annealing said inorganic semiconductor component to provide a semiconductor film; providing a second fluid medium compnsing a dielectric component, and coupling said dielectric component to said inorganic semiconductor film.
申请公布号 WO2009097150(A3) 申请公布日期 2010.10.14
申请号 WO2009US00649 申请日期 2009.02.02
申请人 NORTHWESTERN UNIVERSITY;MARKS, TOBIN, J.;FACCHETTI, ANTONIO;BYRNE, PAUL, D.;KIM, SUNG, HYUN 发明人 MARKS, TOBIN, J.;FACCHETTI, ANTONIO;BYRNE, PAUL, D.;KIM, SUNG, HYUN
分类号 H01L21/00 主分类号 H01L21/00
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