SYSTEM, METHOD AND APPARATUS FOR ALIGNING AND SYNCHRONIZING TARGET MATERIAL FOR OPTIMUM EXTREME ULTRAVIOLET LIGHT OUTPUT
摘要
<p>An extreme ultraviolet light system includes a drive laser system, an extreme ultraviolet light chamber including an extreme ultraviolet light collector and a target material dispenser including a target material outlet capable of outputting a plurality of portions of target material along a target material path, wherein the target material outlet is adjustable. The extreme ultraviolet light system further includes a drive laser steering device, a detection system including at least one detector directed to detect a reflection of the drive laser reflected from the first one of the plurality of portions of target material and a controller coupled to the target material dispenser, the detector system and the drive laser steering device. The controller includes logic for detecting a location of a first one of the plurality of portions of target material from a first light reflected from the first target material.</p>
申请公布号
WO2010117861(A1)
申请公布日期
2010.10.14
申请号
WO2010US29447
申请日期
2010.03.31
申请人
CYMER, INC.;CHROBAK, CHRISTOPHER, P.;PARTLO, WILLIAM N.;FOMENKOV, IGOR, V.;ERSHOV, ALEXANDER, I.;CROUCH, JAMES, H.
发明人
CHROBAK, CHRISTOPHER, P.;PARTLO, WILLIAM N.;FOMENKOV, IGOR, V.;ERSHOV, ALEXANDER, I.;CROUCH, JAMES, H.