| 摘要 |
PROBLEM TO BE SOLVED: To stabilize chucking performance of a chucking apparatus. SOLUTION: The chucking apparatus 40 includes a mounting section 44 arranged around a center axis J1 and mounted with a disk having a center hole; a plurality of claw members 42, formed by a resin injection molding and radially disposed around the center axis outward in the radial direction at the inside of the mounting section; an energizing section 43 for energizing the plurality of claw members radially outward; and a center case 41 for housing the plurality of claw members, while their distal ends are projected, wherein the plurality of claw members turns so that their tips move vertically, when the disk is mounted and also moves in a radial direction. The chucking apparatus further includes a slide contact surface, where each of the plurality of claw members comes in slide contact with a guiding section of the center case when the disk is mounted; and a clearance section 7, of which at least a part is a hole section or notched section positioned within a range in the radial direction where the slide contact surface exists. COPYRIGHT: (C)2011,JPO&INPIT
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