发明名称 Robust Long Wire Resistance Thermometer
摘要 Methods and apparatus for compensating for air or gas temperature fluctuations associated with an interferometer beam path are disclosed. According to one aspect of the present invention, a resistance thermometer assembly includes an insulating tube arrangement, a support arrangement, and a resistance arrangement. The insulating tube arrangement includes a first end and a second end, as well as an insulating tube and a metal film layer that coats the insulating tube. The support arrangement is configured to support the first end and the second end of the insulating tube arrangement. The resistance arrangement is configured to measure a resistance associated with the insulating tube arrangement.
申请公布号 US2010259761(A1) 申请公布日期 2010.10.14
申请号 US20090420586 申请日期 2009.04.08
申请人 NIKON CORPORATION 发明人 EATON JOHN K.
分类号 G01B11/02;H01C3/00 主分类号 G01B11/02
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